Clean room class Fed. Stand.209

100,000

10,000

1,000

100

10※

1※

VDI 2083

6

5

4

3

2※

1※

5.0mm

30,000

3,000

300

─

─

─

Maximum permitted

0.5mm

30,000

3,000

300

─

─

─

number of particles

0.3mm

30,000

3,000

300

─

─

─

per m³ greater than

0.2mm

30,000

3,000

300

─

─

─

0.1mm

30,000

3,000

300

─

─

─

5.0mm

700

70

7

─

─

─

Maximum permitted

0.5mm

100,000

10,000

1,000

100

10

1

number of particles

0.3mm

30,000

─

─

300

30

3

per cuft greater than

0.2mm

30,000

─

─

750

75

7.5

0.1mm

30,000

─

─

─

350

35

Type of air flow

non laminar flow

non laminar flow

almost laminar flow

laminar flow

laminar flow

laminar flow

Air change at 3m room height

h^-1

20－40

30－60

50－150

240－600

240－600

240－600

Air volume

m³/h m²

60－120

90－180

150－450

720－1800

720－1800

720－1800

Average air velocity

m/s

－

－

0.1－0.3

0.2－0.5

0.2－0.5

0.2－0.5

Average exhaust air velocity

m/s

2.5

1－2.5

2.5－1

0.3－0.45

0.45－0.5

0.45－0.5

^{Air exit openings}

^{side wall}

^{low side wall}

^{low level or floor}

^{floor or low level}

^floor

^floor

^{Air inlet openings}

^{ceiling swirl outlet or perforated ceiling}

^{ceiling swirl outlet}

^{filter ceiling}

^{filter ceiling}

^{filter ceiling}

^{filter ceiling}

^{Filter area}

^％

^5－10

^15－20

^30－50

^＞80

^＞90

^＞90

^{Pre-filter maintenance}

^yearly

^{half－yearly}

^quarterly

^quarterly

^monthly

^monthly

^{Particle counting}

^yearly

^monthly

^{14 days}

^weekly

^daily

^continuously